ACCESS
The following steps are enforced to obtain access to Cleanroom with Nano-Microwave & Nano-Power Laboratory
Step 1: SUBMIT KEY REQUEST FORMS
Complete and submit the Keycard Request Form, and send the form directly to Prof. Wen Huang.
Step 2: ATTEND SAFETY TRAINING
Attend the safety training class offered in group. You must pass the training exam with score of 100% before taking the next step.
Step 3: ATTEND CLEANROOM WALKTHROUGH
Attend cleanroom walk-through with instruction from senior group members.
Step 4: TOOL TRAINING AND ACCESS
Schedule training with senior user on a particular tool to become an approved user. This is required before using a tool by yourself. After you become a user, you will be able to reserve a tool and receive information about tool status and availability. Training is required for any use of HF or Piranha etch. Please request training directly from Prof. Wen Huang.